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Article Dans Une Revue J.Vac.Sci.Tech.B Année : 2018

Dynamic SIMS for materials analysis in nuclear science

Résumé

Offering high sensitivity, depth profiling and ion imaging capabilities together with high throughput, dynamic secondary ion mass spectrometry (SIMS) proves extremely useful for a wide range of nuclear science applications. The CAMECA IMS 7f/7f-Auto is a versatile magnetic sector SIMS well suited for such applications. In this work, various examples of material analyses that are of interest for nuclear science are presented: depth profiling of the xenon and mapping of contaminants in CeO2, in-depth distribution of iodine in SiC using the energy filtering technique for improving the I detection limit, and depth profiling analysis of molybdenum in UO2 using eucentric sample rotation for minimizing surface roughness development (thus improving data quality).
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Dates et versions

hal-01959779 , version 1 (21-12-2022)

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Paula Peres, Seo-Youn Choi, François Desse, Philippe Bienvenu, Ingrid Roure, et al.. Dynamic SIMS for materials analysis in nuclear science. J.Vac.Sci.Tech.B, 2018, 36 (3), pp.03F117. ⟨10.1116/1.5017027⟩. ⟨hal-01959779⟩
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