High Frequency Characteristics of Nanocrystalline Co-Fe-Hf-O Soft Magnetic Films
Résumé
The microstructure, electrical resistivity, and high frequency soft magnetic properties of nanocrystalline Co-Fe-Hf-O films were investigated. The films were prepared by rf reactive sputtering technique in Ar + O2 mixed atmosphere under a static magnetic field or no field. In an as-deposited state, a Co44.3Fe19.1Hf14.5O22.1 film deposited in a static field consists of mixed structure of amorphous phase and bcc nanocrystals with 3 - 4 nm in diameter. The real part (ν) of complex permeability of 160 is almost constant up to 1GHz, and extremely high µ'/µ" of 61 at 100 MHz is obtained. These high frequency characteristics are caused by the high electrical resistivity (μ) of 13 µΩm and large anisotropy field (Hk) of 4.8 kA/m.
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